Tabletop SEM
Model: SNE-3000MS
Manufacturers: SEC – Korea
Scanning Electron Microscopy (SEM) is used for various ingredient analysis and surface structure analysis through several detectors after focusing and detecting secondary electron emitted from sample by shooting electron beam on the sample in the chamber. SEM is the foundation technique of MEMS (Microelectromechanical systems) industry and an equipment for analysis and measurement of ultrafine nano structure having resolution of 1nm.
Features:
SNE-3000MS with various detectors SE and high vacuum
SNE-3000MS has magnification of Maximum 60,000x
SE (Secondary Electron)
Create images with the height level information. Mostly used for surface inspection
Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
Able to get various analysis results with various scan modes measurement tool.
Specifications:
|
Resolution |
15 nm (30kV, SE Image) |
|
Magnification |
20x – 60.000x |
|
Accelerating Voltage |
1 – 30kV (1/5/10/15/20/30) |
|
Detector |
Secondary Electron Image (SE) |
|
Electron Gun |
Pre-centered Tungsten Filament Cartridge |
|
Stage Traverse |
X: 40mm, Y: 40mm, R: 360o |
|
Max. Sample size |
70 mm in Diameter x 30 mm in Height |
|
Automation Function |
Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness |
|
Image Format |
BMP, JPEG, PNG, TIFF |
|
Vacuum Mode |
High Vacuum |
|
Vacuum Pump |
Rotary Pump/ Turbo Molecular Pump (Full Automation) |
|
Dimensions |
Main Unit: 390(W)x380(D)x560(H)mm, 83kg Controller Unit: 390(W)x325(D)x560(H)mm, 37kg Rotary Pump: 400(W)x160(D)x340(H)mm, 24kg |
Applications:
