Tabletop SEM
Model: SNE-4500M Plus
Manufacturers: SEC – Korea
Scanning Electron Microscopy (SEM) is used for various ingredient analysis and surface structure analysis through several detectors after focusing and detecting secondary electron emitted from sample by shooting electron beam on the sample in the chamber. SEM is the foundation technique of MEMS (Microelectromechanical systems) industry and an equipment for analysis and measurement of ultrafine nano structure having resolution of 1nm.
Features:
SNE-4500M Plus provides ease-of-use and the best performance of all
SNE-4500M Plus with various detectors SE & BSE and high & low vacuum
SNE-4500M Plus model provides ease-of-use and the best performance of all.
SNE-4500M Plus has magnification of Maximum 150,000x, and it is optimized to surface/ cross section analysis with the wide stage composition.
Able to scan iamges with high resolution of 5nm by installation of variable aperture with ease of use.
SE (Secondary Eletron)
Creat images with the height level informaiton. Mostly used for surface inspection.
BSE (BackScattered Eletron)
Create images with material information(Elements)
The only Table-top SEM of which has 5-axis, enables unlimited movement of stage
Easy and convenient image acquisition possible with "Click & Move" which is one of features of Motorized stage
Able to get images of variable angles via Tilting -45°~ 90°, and easily analyze EDS
Specifications:
|
Plus A |
Plus B |
Resolution |
5 nm (SE image, 30kV) |
5 nm (SE); 8 nm (BSE) |
Magnification |
20x – 150.000x |
|
Accelerating Voltage |
1 – 30kV (1/5/10/15/20/30) |
|
Detector |
Secondary Electron (SE) |
Secondary Electron (SE) Back Scattered Electron (BSE) |
Electron Gun |
Pre-centered Tungsten Filament Cartridge |
|
Stage Traverse |
X: 40mm, Y: 40mm, R: 360o Z: 0 to 40mm, T: -45o to 90o |
|
Max. Sample Size |
80mm in Diameter x 35mm in Height |
|
Automation Function |
Auto Start, Auto Focus |
|
Image Format |
BMP, JPEG, PNG, TIFF |
|
Vacuum Mode |
High Vacuum |
Low & High Vacuum (Multi) |
Vacuum Pump |
Rotary Pump / Turbo Molecular Pump (Full Automation) |
|
Dimensions |
Main Unit: 390(W)x380(D)x560(H)mm, 88kg Controller Unit: 390(W)x325(D)x560(H)mm, 37kg Rotary Pump: 400(W)x160(D)x340(H)mm, 24kg |
Applications: