Tabletop SEM
Model: SNE-3200M
Manufacturers: SEC – Korea
Scanning Electron Microscopy (SEM) is used for various ingredient analysis and surface structure analysis through several detectors after focusing and detecting secondary electron emitted from sample by shooting electron beam on the sample in the chamber. SEM is the foundation technique of MEMS (Microelectromechanical systems) industry and an equipment for analysis and measurement of ultrafine nano structure having resolution of 1nm.
Features:
SNE-3200M with various detectors SE & BSE and high & low vacuum
SNE-3200M has magnification of Maximum 60.000x.
SE (Secondary Eletron)
Creat images with the height level informaiton. Mostly used for surface inspection.
BSE (BackScattered Eletron)
Create images with material information (Elements)
Specifications:
|
Resolution |
15 nm (30kV, SE Image); 20 nm (30kV, BSE Image) |
|
Magnification |
20x – 60.000x |
|
Accelerating Voltage |
1 – 30kV (1/5/10/15/20/30) |
|
Detector |
Secondary Electron (SE) Back Scattered Electron (BSE) |
|
Electron Gun |
Pre-centered Tungsten Filament Cartridge |
|
Stage Traverse |
X: 35mm, Y: 35mm, R: 360o |
|
Max. Sample size |
70 mm Diameter x 30mm in Height |
|
Automation Function |
Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness |
|
Image Format |
BMP, JPEG, PNG, TIFF |
|
Vacuum Mode |
High & Low vacuum |
|
Vacuum Pump |
Rotary Pump/ Turbo Molecular Pump (Full Automation) |
|
Dimensions |
Main Unit: 390(W)x380(D)x560(H)mm, 83kg Controller Unit: 390(W)x325(D)x560(H)mm, 37kg Rotary Pump: 400(W)x160(D)x340(H)mm, 24kg |
Applications:
